Ammonia Purification and Recovery Unit
This unit is an integrated solution for ammonia recovery and purification. It adopts advanced combined process of scrubbing and distillation to efficiently recover ammonia from ammonia-containing waste gas and purify it to electronic-grade high-purity ammonia (purity ≥ 99.99994%), achieving dual goals of resource utilization and emission reduction.
- Feedstock：Ammonia-containing mixed gas (e.g., air, nitrogen, etc.)
- Recovery Rate：≥90%
- Application：Fields requiring high-purity ammonia such as semiconductor manufacturing, photovoltaic industry, chemical synthesis, scientific research, etc.
● Semiconductor & Electronics: Used as an etchant, cleaning agent, and raw material for nitride film deposition.
● Photovoltaic: For preparing anti-reflective coatings on crystalline silicon solar cells.
● Chemical: Ammonia recovery in production of synthetic ammonia, fertilizers, refrigerants, etc.
● Environmental Protection: Treatment of industrial ammonia-containing exhaust gas to enable resource recovery.
● Scientific Research: Supply of high-purity ammonia for laboratory experiments.
Proprietary process package with optimized process design; high-efficiency packed columns and precision heat exchangers ensure high separation efficiency; ammonia recovery rate ≥90%, product purity up to 99.99994%.
● Economical & Energy-Saving
Low unit energy consumption; Steam heating can optionally replace electric heating to further reduce operating costs; wastewater can be treated for reuse or discharged after meeting standards.
● Safe & Reliable
Multi-interlock protection for pressure, temperature and liquid level throughout the process; automatic gas leak detection and emergency shutdown system; key equipment with one-operating-one-standby configuration for continuous stable operation.
● Intelligent & Efficient
Integrated DCS and SIS control systems for fully automatic operation; supports remote monitoring and mobile APP inquiry; online product purity detection with automatic switchover for off-spec products.
The ammonia-containing mixed gas enters the scrubbing tower, contacts countercurrently with circulating water, ammonia is absorbed by water to form ammonia solution, and the purified air is vented. The ammonia solution is pressurized and fed into the distillation column. Through distillation, utilizing the boiling point difference between ammonia and water, high-purity ammonia vapor is obtained at the top, condensed and collected, while bottoms wastewater is discharged for treatment.
5.1 Typical Feed Gas Conditions
|
Parameter |
Range |
|
Ammonia content |
1% ~ 10% (vol.) |
|
Capacity |
50 ~ 5000 Nm3/h |
|
Temperature |
Ambient ~ 50℃ |
|
Pressure |
Minimally Positive ~ 0.1 MPa |
5.2 Product Performance
|
Description |
Specification |
|
Ammonia Recovery Rate |
≥90％ |
|
Product Purity |
≥99.99994％ |
|
Output (As Ammonia) |
Customized Per Feed |
5.3 Product Purity Specification（Compliant with GB/T 14601-2009 Electronic Grade Ammonia）
|
Component |
Specification |
|
Ammonia (NH3) purity (vol%) /10-2 |
≥ 99.99994 |
|
Hydrogen (H2) content (vol%) /10-6 |
＜0.1 |
|
Oxygen (O2) content (vol%) /10-6 |
＜0.1 |
|
Carbon monoxide (CO) content /10-6 |
＜0.05 |
|
Carbon dioxide (CO2) content /10-6 |
＜0.1 |
|
Hydrocarbons (C1~C3) content /10-6 |
＜0.05 |
|
Moisture (H2O) content /10-6 |
＜0.2 |
|
Total impurities content /10-6 |
≤0.6 |
● DCS (Distributed Control System)
Automatic monitoring, data logging, alarm and interlock throughout the process
● SIS (Safety Instrumented System)
Independently configured, automatic emergency shutdown to ensure safety
● Online Analysis System
Equipped with high-precision gas chromatograph and trace moisture analyzer for real-time product purity monitoring, automatic switch-out for off-spec product.
● Remote Monitoring
Supports data upload to central control room and real-time status inquiry via mobile APP
● Gas Leak Detection
Ammonia detectors interlocked with control system, automatic alarm and shutdown upon leakage
● Product design, manufacturing and inspection strictly comply with Chinese national standards and industrial codes：
- GB/T 14601-2009"Electronic Grade Ammonia"
- GB 150"Pressure Vessels"
- TSG 21"Safety Technical Supervision Regulation for Stationary Pressure Vessels"
- GB/T 20801"Code for Pressure Piping"
● Key materials, instruments and valves are selected from well-known domestic and international brands
● Strict leak, strength, and performance tests are conducted before delivery
● Customized Design
Provide tailored solutions based on customer's feed gas composition, capacity and site conditions
● Installation Guidance & Commissioning
Dispatch professional engineers for on-site installation guidance and system commissioning.
● Operation Training
Provide system operation and maintenance training for the owner
● After-Sales Support
Long-term spare parts supply, quick response to technical service requests
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